Approximation Algorithms for Wafer to Wafer Integration Problem

Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a multi-dimensional assignment problem and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3 2 and 4 3 for WWI-3. We show that a special case of yield optimization problem can be solved in polynomial time.